红外与激光工程
2022, 51(1): 20210671
暨南大学纳米光子学研究院,广东 广州 510632
光谱分析技术具有快速、准确和绿色检测的特点,在科学研究、信息、生物医疗、食药检测、农业、环境和安防等领域有广泛而且重要的应用。然而现有光谱技术与检测设备通常较为庞大复杂,难以适合现场快检、轻载荷平台等便携式应用场景。近年来,微型光谱检测技术和设备受到广泛关注并得到迅速发展,具有尺寸、重量、功耗等方面的显著优势,尤其是基于散斑检测的计算光谱分析技术,可以通过记录分析散射元件对被测光形成的散斑图获得高精度的光谱信息。本文将介绍相关技术原理和技术发展现状,分析现有技术性能和优缺点,讨论并总结未来发展方向和应用前景。
光谱 散斑 微型光谱仪 压缩感知 spectrum speckle microspectrometer compressive sensing
Author Affiliations
Abstract
1 Institute of Nanophotonics, Jinan University, Guangzhou 511443, China
2 University of Electronic Science and Technology of China, Chengdu 610054, China
Gas identification and concentration measurements are important for both understanding and monitoring a variety of phenomena from industrial processes to environmental change. Here a novel mid-IR plasmonic gas sensor with on-chip direct readout is proposed based on unity integration of narrowband spectral response, localized field enhancement and thermal detection. A systematic investigation consisting of both optical and thermal simulations for gas sensing is presented for the first time in three sensing modes including refractive index sensing, absorption sensing and spectroscopy, respectively. It is found that a detection limit less than 100 ppm for CO2 could be realized by a combination of surface plasmon resonance enhancement and metal-organic framework gas enrichment with an enhancement factor over 8000 in an ultracompact optical interaction length of only several microns. Moreover, on-chip spectroscopy is demonstrated with the compressive sensing algorithm via a narrowband plasmonic sensor array. An array of 80 such sensors with an average resonance linewidth of 10 nm reconstructs the CO2 molecular absorption spectrum with the estimated resolution of approximately 0.01 nm far beyond the state-of-the-art spectrometer. The novel device design and analytical method are expected to provide a promising technique for extensive applications of distributed or portable mid-IR gas sensor.
gas sensor mid-IR on-chip surface plasmon resonance spectroscopy Opto-Electronic Advances
2020, 3(7): 07190040